To promote the model reuse efficiency of 3D Computer Aided Design (CAD), aiming at the flaw of semantic expression in previous 3D model retrieval systems, a similarity measure method based on model semantic representation of Web Ontology Language (OWL) was presented. Firstly, 3D CAD master model was transformed into structuralized representation model with class-property feature as its basic semantic object. And then, the feature semantic information for matching two models was extracted from OWL representation model to be a quantitative similarity unit. And a method of total weight combining subgraph isomorphism and Tversky algorithm was proposed for similarity measure. Finally, the experiment verified the feasibility and effectiveness of the proposed method. The comprehensive quantitative assessments of the experiment show that the proposed method makes the evaluation benchmark switch from the object itself to the set of semantic description of two object properties, and can objectively reflect the similar degree of the two contrast models.